Water Vapor Cryo Pump
Significantly improve vacuum levels when used in combination with a turbo pump! Vacuum evacuation time can also be greatly reduced!!
The MicroStar manufactured by RICOR is a vacuum auxiliary pump using the Stirling cooler method. When used in conjunction with a turbo pump, it significantly improves vacuum levels and greatly reduces evacuation time. Unlike GM-type cryopumps, it does not require a separate large helium compressor or helium lines, making it compact and low power consumption. It is ideal as a vacuum auxiliary pump for load lock chambers, transfer chambers, process chambers, and vacuum deposition equipment in semiconductor processing systems.
- 企業：アイ・アール・システム
- 価格：Other
